The "Clean" cleanliness group is part of the SNF/ExFab contamination policy.
The following is a list of equipment that fall into the "Clean" category.
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
AMAT Centurion Epitaxial System epi2 |
Epitaxial AMAT Centurion Training | Clean | SNF Paul G Allen L107 Cleanroom |
N and P doping available- intrinsic to 5E19 Operating pressure range is 5-300Torr |
|
Tystar Bank 3 Tube 12 Poly B3T12 Clean Poly |
Tystar LPCVD Tube Training | Clean | SNF Paul G Allen L107 Cleanroom | |
|
Wet Bench Clean_res- hotphos wbclean_res-hotphos |
Wet Bench Clean Piranha/HF/Phosphoric Training | Clean | SNF Paul G Allen L107 Cleanroom |
Resist should have been removed |
|
Tystar Bank 3 Tube 10 Nitride B3T10 Clean Nitride |
Tystar LPCVD Tube Training | Clean | SNF Paul G Allen L107 Cleanroom |