Nitrous
Chemical Formula:
N2O
| Equipment name & NEMO ID | Cleanliness |
Location |
Material Thickness Range | Approved Materials supplied by Lab |
|---|---|---|---|---|
|
PlasmaTherm Shuttlelock PECVD System ccp-dep |
SNF Paul G Allen L107 Cleanroom |
100.00 Å -
4.00 μm
|
||
|
Oxford Plasma Pro PECVD Ox-PECVD |
SNF Paul G Allen L107 Cleanroom |
100.00 Å -
4.00 μm
|