Chemical Formula:
NF3
| Equipment name & NEMO ID | Cleanliness |
Location |
Primary Materials Etched | Other Materials Etched | Gases |
|---|---|---|---|---|---|
|
Oxford Plasma Pro ICP-RIE Ox Ox-Ox |
SNF Paul G Allen L107 Cleanroom |
|
No equipment matches all of the filter criteria you have set above.