Wafer polishing is used to planarize patterned surfaces and to smooth surface roughness.
| Processing Techniques |
Equipment name & NEMO ID |
Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Wafer Polishing |
CMP GnP POLI-400L cmp |
Flexible | SNF Exfab Paul G Allen 159 Capitola |