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Etching

Etching is a broad term that is used to describe the removal of material from your sample. The sub categories may be helpful for narrowing down your search, and be aware that there may be more than one technique and/or tool that could be used for your process.

Dry etching uses gaseous chemistries and plasma energy to etch materials from the sample.
Wet etching uses liquid chemistries to etch materials from samples.
Vapor etching uses HF Vapor to etch materials. It is primarily used to etch structures that would be damaged during the rinse and dry process in a standard wet etch.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Silicon Oxide Wet Etching, Wet Chemical Processing	Wet Bench Clean_res-hf wbclean_res-hf	Semi-automated wet bench for etching oxide from 3", 4", and 6" Si, SiGe, and quartz substrates using 50:1 HF, 6:1BOE, or 20:1BOE. 2 baths can hold up to 25 wafers. Part of the Clean Cleanliness Group.	Clean	SNF Paul G Allen L107 Cleanroom
Inductively Coupled Plasma Etching (ICP)	Oxford Plasma Pro ICP-RIE ALE Ox-ALE	Oxford ICP-RIE Atomic Layer Etching (OX-ALE) is an Inductively Coupled Plasma (ICP) etch system designed for high-precision etching of silicon-based materials, III-V semiconductors, and 2D materials.	Flexible	SNF Paul G Allen L107 Cleanroom
Acid or Base Wet Etching, Piranha Cleaning, Wet Chemical Processing	Wet Bench Flexcorr 4 wbflexcorr-4	Manual wet etching of non-standard materials using acids or bases. Hot plate, HF bath, and controlled temperature bath available. GaAs not allowed.	Flexible	SNF Paul G Allen L107 Cleanroom
Inductively Coupled Plasma Etching (ICP)	Oxford Plasma Pro ICP-RIE Ox Ox-Ox	Oxford ICP-RIE Oxide Etcher (Ox-Ox) is an Inductively Coupled Plasma (ICP) etch system optimized for high-precision etching of silicon-based materials	Clean	SNF Paul G Allen L107 Cleanroom

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Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Chemicals	Primary Materials Etched	Substrate Size	Maximum Load (number of wafers)	Gases	Notes
Acid or Base Wet Etching, Piranha Cleaning, Wet Chemical Processing	Wet Bench Flexcorr 2 wbflexcorr-2	Flexible	Acids Bases		Pieces 2" 3" 4" 6"			Manual wet etching of non-standard materials. Hot pots available. GaAs allowed in personal labware only
Acid or Base Wet Etching, Piranha Cleaning, Wet Chemical Processing	Wet Bench Flexcorr 3 wbflexcorr-3	Flexible	Acids Bases		Pieces 2" 3" 4" 6"			Manual wet etching of non-standard materials using acids or bases. Hot Plate available. GaAs not allowed.
Acid or Base Wet Etching, Piranha Cleaning, Wet Chemical Processing	Wet Bench Flexcorr 4 wbflexcorr-4	Flexible	Acids Bases		Pieces 2" 3" 4" 6"			Manual wet etching of non-standard materials using acids or bases. Hot plate, HF bath, and controlled temperature bath available. GaAs not allowed.
Vapor Etching	Xactix Xenon Difluoride Etcher xactix	"All"		Ge Si SiGe	Pieces 2" 3" 4" 6"	1	N₂ XeF₂	Isotropic Si etching; can be used for backside Si removal on small pieces

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