Drying samples in the SNF is often done by using an N2 gun or by using an SRD (Spin Rinse Dryer) near the wet benches. In cases where your structure may be damaged by standard drying techniques, the CPD (Critical Point Dryer) may be useful.
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness |
Location |
|---|---|---|---|---|
| CO2 Drying, Wet Chemical Processing |
Critical Point Dryer Tousimis Automegasamdri-936 cpd |
Critical Point Drying (CPD) tool is used for carbon dioxide (CO2) drying after release of bulk or surface micromachined devices. |
Flexible | SNF Paul G Allen L107 Cleanroom |