CO2 drying is an efficient method of drying delicate samples without damaging their structure by surface tension that occurs when changing from the liquid to the gaseous phase.
| Processing Techniques |
Equipment name & NEMO ID |
Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| CO2 Drying, Wet Chemical Processing |
Critical Point Dryer Tousimis Automegasamdri-936 cpd |
Critical Point Drying (CPD) tool is used for carbon dioxide (CO2) drying after release of bulk or surface micromachined devices. |
Flexible | SNF Paul G Allen L107 Cleanroom |