Ink |
Fujifilm Dimatix Ink Jet Printer nanoinkjet |
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Flexible |
SNF Exfab Paul G Allen 155 Mavericks |
Sputtering |
Hummer V Sputter Coater hummer |
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Flexible |
SNF Exfab Paul G Allen 104 Stinson |
Deposition |
PDMS Workbench |
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Flexible |
SNF Exfab Paul G Allen 155 Mavericks |
Low Pressure (LP) CVD |
Tystar Bank 1 Tube 3 Poly B1T3 Flexible Poly |
LPCVD of Poly silicon, Amorphous Silicon, Doped Silicon, Silicon-Germanium.
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Flexible |
SNF Paul G Allen L107 Cleanroom |
Low Pressure (LP) CVD |
Tystar Bank 3 Tube 12 Poly B3T12 Clean Poly |
LPCVD of Poly silicon, Amorphous Silicon, Doped Silicon.
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Clean |
SNF Paul G Allen L107 Cleanroom |
Low Pressure (LP) CVD |
Tystar Bank 3 Tube 10 Nitride B3T10 Clean Nitride |
LPCVD of Silicon Nitride, Stoichiometric silicon nitride, low-stress silicon nitride, Silicon Oxy Nitride.
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Clean |
SNF Paul G Allen L107 Cleanroom |
Low Pressure (LP) CVD |
Tystar Bank 2 Tube 7 Nitride B2T7 Flexible Nitride |
LPCVD of Stoichiometric silicon nitride, low-stress silicon nitride, Silicon Oxy Nitride.
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Flexible |
SNF Paul G Allen L107 Cleanroom |
Low Pressure (LP) CVD |
Tystar Bank 1 Tube 4 LTO B1T4 Flexible LTO |
LPCVD of Low Temperatur Oxide, PSG, BSG, BPSG.
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Flexible |
SNF Paul G Allen L107 Cleanroom |
Low Pressure (LP) CVD |
Tystar Bank 3 Tube 11 TEOS B3T11 Clean TEOS |
LPCVD of TEOS Oxide.
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Clean |
SNF Paul G Allen L107 Cleanroom |
Low Pressure (LP) CVD |
Tystar Bank 2 Tube 8 LTO B2T8 Clean LTO |
LPCVD of Low Temperatur Oxide, PSG, BSG, BPSG.
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Clean |
SNF Paul G Allen L107 Cleanroom |
Evaporation |
KJL Evaporator 1 |
This e-beam evaporator can evaporate a variety of metals (no oxides) onto your substrates. It has an integrated ion mill for substrate precleaning and can do substrate tilting.
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SNSF NPC Spilker suite 6 |
Plasma Enhanced (PE) CVD |
Oxford Plasma Pro PECVD Ox-PECVD |
Ox-PECVD is dual frequnency plasma deposition system that can do silicon dioxide, amorphous, Oxynitride, silicon carbide and multi stress Nitride.
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Semiclean, Flexible |
SNF Paul G Allen L107 Cleanroom |