| Processing Techniques |
Equipment name & NEMO ID |
Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Pre-Diffusion Clean, Pre-LPCVD or Pre-Metal Clean, Wet Chemical Processing |
Wet Bench Clean 1 wbclean-1 |
Wet Bench Clean-1 and 2 is used for RCA cleaning 3", 4", and 6" silicon, silicon germanium, or quartz wafers which are in the 'clean' cleanliness group. |
Clean | SNF Paul G Allen L107 Cleanroom |
| Pre-Diffusion Clean, Pre-LPCVD or Pre-Metal Clean, Wet Chemical Processing |
Wet Bench Clean 2 wbclean-2 |
Wet Bench Clean-1 and 2 is used for RCA cleaning 3", 4", and 6" silicon, silicon germanium, or quartz wafers which are in the 'clean' cleanliness group. |
Clean | SNF Paul G Allen L107 Cleanroom |