Characterization is a broad term that is used to describe any method of analysis of properties of materials and devices. The various tools listed here will use different techniques to study a wide variety of properties.
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Reflectometry |
Nanospec 210XP nanospec2 |
Non-contact, spectro-reflectometry to measure the thickness of transparent films > 300 Ã (up to two) on substrates, such as silicon, that are reflective in the visible range. |
"All" | SNF Exfab Paul G Allen L106 Stinson |
| Step Profile |
Profilometer AlphaStep D-300 alphastep2 |
A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.
|
Flexible | SNF Exfab Paul G Allen L106 Stinson |
| Step Profile |
Profilometer Alphastep 500 alphastep |
Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group. Scan length from 100 Angstroms up to 0.3 mm. Stylus tip radius is 5 µm.
|
Flexible | SNF Exfab Paul G Allen L106 Stinson |