Characterization is a broad term that is used to describe any method of analysis of properties of materials and devices. The various tools listed here will use different techniques to study a wide variety of properties.
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Step Profile |
Profilometer Alphastep 500 alphastep |
Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group. Scan length from 100 Angstroms up to 0.3 mm. Stylus tip radius is 5 µm.
|
Flexible | SNF Exfab Paul G Allen L104 Stinson |
| Sheet Resistance Measurement | Prometrix Resistivity Mapping System |
Contact sheet resistance mapping system for 2"up to 8" wafers. |