Characterization is a broad term that is used to describe any method of analysis of properties of materials and devices. The various tools listed here will use different techniques to study a wide variety of properties.

Processing Techniques Equipment name & NEMO ID Teaser Blurb Cleanliness Location
Reflectometry Nanospec 210XP
nanospec2

Non-contact, spectro-reflectometry to measure the thickness of transparent films > 300 Å (up to two) on substrates, such as silicon, that are reflective in the visible range.

"All" SNF Exfab Paul G Allen L104 Stinson
Optical Profilometer, Interferometry Sensofar S-neox
s-neox

3D optical profiler combining confocal, interferometry, and focus variation techniques to measure the surface height of smooth to very rough, ideally reflecting surfaces.

"All" SNF Paul G Allen L107 Cleanroom

Pages