| Processing Technique |
Equipment name & NEMO ID |
Cleanliness | Substrate Size | Maximum Load (number of wafers) | Notes | Stylus Tip Radius |
|---|---|---|---|---|---|---|
| Atomic Force Microscopy (AFM) |
Asylum AFM afm-asylum |
Flexible | ||||
| Step Profile | Dektak XT-S Stylus Profiler SNSF NPC | 1 | 12.5 µm | |||
| Atomic Force Microscopy (AFM) |
Nanocue AFM AFM NanoCue |
Flexible | ||||
| Step Profile |
Profilometer Alphastep 500 alphastep |
Flexible | 1 |
500Å to 300µm |
5 µm | |
| Step Profile |
Profilometer AlphaStep D-300 alphastep2 |
Flexible | 1 | 2 µm | ||
| Optical Profilometer, Interferometry |
Sensofar S-neox s-neox |
"All" | 1 |
non contact 3D optical profiling |
Stanford Nanofabrication Facility
Lab User Guide