Processing Technique Equipment name & NEMO ID Cleanliness Material Thickness Range Substrate Size Maximum Load (number of wafers) Stylus Tip Radius
Microscopy Keyence Digital Microscope VHX-6000
keyence 		"All"
Scanning Electron Microscopy (SEM) SEM -Zeiss Merlin
sem-merlin 		"All"
0.00 mm - 35.00 mm
one