Sheet resistance is a common electrical property used to characterize thin films of conducting and semiconducting materials. It is a measure of the lateral resistance through a thin square of material, and it is independent of the size of the square.
| Processing Technique | Equipment name & NEMO ID | Cleanliness | Material Thickness Range | Substrate Size | Maximum Load (number of wafers) | Process Temperature Range | Notes | Stylus Tip Radius |
|---|---|---|---|---|---|---|---|---|
| Sheet Resistance Measurement |
Prometrix Resistivity Mapping System prometrix |
"All" | 1 |
3 Probe Heads for different cleanliness groups. |
||||
| Sheet Resistance Measurement, Hall measurement |
Lakeshore Hall Measurement System LakeshoreHall |
"All" |
100.00 μm -
1000.00 μm
|
1 piece |
-258 °C - 1000 °C
|
|||
| Sheet Resistance Measurement |
LEI1500 Contactless Sheet Resistance Mapping eddycurrent |
"All" | 1 wafer(2" to 8") |