Reflectometry is a measurement technique that utilizes the changes in light reflected from an object to determine geometric and material propertiesof that object. Reflectance spectrometers measure the intensity of the reflected light across a range of wavelengths. For dielectric films these intensity variations are typically used to detemine the thickness of the film.
| Processing Technique | Equipment name & NEMO ID | Cleanliness | Substrate Size | Maximum Load (number of wafers) |
Notes |
Stylus Tip Radius |
|---|---|---|---|---|---|---|
| Reflectometry |
Nanospec 3 nanospec3 |
"All" | ||||
| Reflectometry |
Reflectance Spectrometer Filmetrics F40 filmetrics |
"All" | one piece or wafer | |||
| Reflectometry |
Nanospec 210XP nanospec2 |
"All" |
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã |