Reflectometry is a measurement technique that utilizes the changes in light reflected from an object to determine geometric and material propertiesof that object. Reflectance spectrometers measure the intensity of the reflected light across a range of wavelengths. For dielectric films these intensity variations are typically used to detemine the thickness of the film.
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Reflectometry |
Nanospec 3 nanospec3 |
"All" | SNF Paul G Allen L107 Cleanroom | |
| Reflectometry |
Reflectance Spectrometer Filmetrics F40 filmetrics |
"All" | SNF Paul G Allen L107 Cleanroom | |
| Reflectometry |
Nanospec 210XP nanospec2 |
Non-contact, spectro-reflectometry to measure the thickness of transparent films > 300 Ã (up to two) on substrates, such as silicon, that are reflective in the visible range. |
"All" | SNF Exfab Paul G Allen 104 Stinson |