| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness |
Location |
|---|---|---|---|---|
| Wafer Prime (HMDS), Singe |
HMDS Vapor Prime Oven, YES yes |
YES oven: Wafer singe at 150ºC and HMDS prime. |
"All" | SNF Paul G Allen L107 Cleanroom |
| Wafer Prime (HMDS) |
HMDS Vapor Prime Oven, YES2 yes2 |
YES2 oven: HMDS prime at 150ºC |
"All" | SNF Exfab Paul G Allen 104 Stinson |
Stanford Nanofabrication Facility
Lab User Guide