| Processing Technique |
Equipment name & NEMO ID |
Cleanliness | Chemicals | Substrate Size | Process Temperature Range | Notes | Stylus Tip Radius |
|---|---|---|---|---|---|---|---|
| Wafer Prime (HMDS), Singe |
HMDS Vapor Prime Oven, YES yes |
"All" |
150 ºC
|
Two programs: Singe and HMDS prime or Singe only. No Resist allowed! |