Coating is the term used to cover the substrate (wafer or piece) with a UV light sensitive film that is used to pattern the surface of the material. Spin coating is the most popular method.
| Processing Techniques |
Equipment name & NEMO ID |
Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Resist Coat (automatic) |
SVG Resist Coat Track 2 svgcoat2 |
Resist coater and bake (automatic) for 4 inch wafers. |
"All" | SNF Paul G Allen L107 Cleanroom |
| Resist Coat (automatic) |
SVG Resist Coat Track 1 svgcoat |
Resist coater and bake (automatic) for 4 inch wafers.
|
"All" | SNF Paul G Allen L107 Cleanroom |
| Resist Coat (manual) |
Laurell Manual Resist Spinner laurell-R |
"All" | SNF Paul G Allen L107 Cleanroom | |
| Resist Coat (manual) |
Headway Manual Resist Spinner headway2 |
"All" | SNF Paul G Allen L107 Cleanroom | |
| Resist Coat (manual) |
Headway 3 Manual Resist Spinner headway3 |
"All" | SNF Exfab Paul G Allen 104 Stinson | |
| Resist Spray Coat (manual) |
EVG 101 Spray Coater evgspraycoat |
"All" | SNF Paul G Allen L107 Cleanroom |