| Processing Technique | Equipment name & NEMO ID | Cleanliness | Substrate Size | Process Temperature Range | Notes | Stylus Tip Radius |
|---|---|---|---|---|---|---|
| Resist Prebake |
Oven 90°C prebake oven90 |
"All" |
90 ºC
|
Bakes wafers after resist coating. |
Stanford Nanofabrication Facility
Lab User Guide