Lift Off Layer
Preferred Short Name:
LOL
LOL is a resist-like layer that can be spin coated prior to resist coating to enable a bi-layer liftoff process that can address profile concerns.
Equipment name & Badger ID |
Training Required & Charges | Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Laurell Manual Resist Spinner laurell-R |
Laurell Manual Resist Spinner Training 1.00 hours |
SNF Cleanroom Paul G Allen L107 |
SU-8, LOL, Ebeam resists allowed. No Acetone allowed. |
