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GaAs processing and citric acid introduction

PROM Request Title: 
GaAs processing and citric acid introduction
PROM Request Summary: 
Request to use GaAs substrates in gold contamination level tools and to bring in citric acid.
PROM Date: 
06/25/2014
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
GaAs processing and citric acid introduction
Equipment List: 
Wet Bench Flexcorr 1 (wbflexcorr-1)