Crystal Bond 509 in Xactix (XeFe2) Etcher

PROM Request Title:

PROM Request Summary:

Request to use Crystal Bond 509 in Xactix (XeFe2) Etcher. Crystal Bond 509 is approved for lab use but not standard for Xactix.

PROM Date:

02/21/2014

PROM Decision:

Approved for use with gold contaminated chuck.

Link to PROM Request and supporting documentation:

Equipment List: