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Silicon Germanium

Chemical Formula: 

A deposited layer of SiGe.  The ratio of Si to Ge can be controlled and will vary depending on the application.

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger IDsort descending Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
AMAT Centurion Epitaxial System
SNF Cleanroom Paul G Allen L107
50.00 Å - 3.00 μm
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