Drying

Drying samples in the SNF is often done by using an N2 gun or by using an SRD (Spin Rinse Dryer) near the wet benches. In cases where your structure may be damaged by standard drying techniques, the CPD (Critical Point Dryer) may be useful.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
CO2 Drying, Wet Chemical Processing	Critical Point Dryer Tousimis Automegasamdri-915B cpd	Critical Point Drying (CPD) tool is used for carbon dioxide (CO2) drying after release of bulk or surface micromachined devices.	Flexible	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Chemicals	Substrate Size	Notes
CO2 Drying, Wet Chemical Processing	Critical Point Dryer Tousimis Automegasamdri-915B cpd	Flexible	CO₂	Pieces 2" 3" 4" 6"	CO2 drying after release of micromachined devices

Techniques

Drying

Technique Tabs