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Lesker Sputter (lesker-sputter)


SNF-Lesker sputter

Lesker is a load locked single wafer metal sputter providing flexible processing options for non-CMOS compatible materials. The eight gun magnetron Lesker is classified as gold contaminated and provides non-directional thin film (< 1 um)


Lab Organization, Location, and NEMO Information

Lab Organization: 
NEMO Area: 
nSiL: 155A Venice

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Check the SNF Training Calendar for any scheduled training.

A shadowing session is recommended but not required. Only a training with tool owner is required. Training sessions are scheduled for 10:30am on the 1st Wednesday of the month. This training will qualify you for both Lesker sputtering systems. Review...

Operating Instructions