Resist Coat Equipment Summary

Processing Techniques	Equipment name (NEMO ID)	Cleanliness	Resist	Substrate Size	Notes
Resist Spray Coat (manual)	EVG 101 Spray Coater (evgspraycoat)	All	Resists	Pieces 2" 3" 4" 6"	Spray coating of resists
Resist Coat (manual)	Headway 3 Manual Resist Spinner (headway3)	All	Resists Shipley 3612 resist SPR220-3 resist SPR220-7	Pieces 2" 3" 4"
Resist Coat (manual)	Headway Manual Resist Spinner (headway2)	All	AZ5214IR Shipley 3612 resist SPR 955 CM-.7 resist SPR220-3 resist SPR220-7 (C₅O₂H₈)_n	Pieces 2" 3" 4" 6"	Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists
Resist Coat (manual)	Laurell Manual Resist Spinner (laurell-R)	All	Resists SU-8 LOL	Pieces 2" 3" 4" 6"	SU-8, LOL, Ebeam resists allowed. No Acetone allowed.
Resist Coat (automatic)	SVG Resist Coat Track 1 (svgcoat)	All	Shipley 3612 resist SPR220-3 resist SPR220-7	4"	Automatic Resist spinning and bake
Resist Coat (automatic)	SVG Resist Coat Track 2 (svgcoat2)	All	AZ5214IR Shipley 3612 resist SPR 955 CM-.7 resist	4"	Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal.

Last modified: 30 Apr 2020